The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 1985
Filed:
Jan. 13, 1984
Applicant:
Inventor:
Daniel H Grantham, Glastonbury, CT (US);
Assignee:
United Technologies Corporation, Hartford, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G / ; G01L / ;
U.S. Cl.
CPC ...
361283 ; 29 2541 ; 73718 ;
Abstract
A capacitive pressure transducer has a pedestal 25 formed in a silicon layer 14 surrounded by a moat 26 extending through the silicon layer, with borosilicate glass 17, 22 at the edges of the silicon layer forming the walls of the pressure chamber, with a wafer 28 of silicon bonded thereto. The pedestal 25 is joined to the walls of the vacuum chamber by borosilicate glass 16, whereby it is wholly, electrically isolated therefrom. A method of forming a capacitive pressure transducer utilizing the variable etch rates of aluminum, glass and silicon, together with field assisted bonding, is also disclosed.