The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 1985

Filed:

Jun. 18, 1982
Applicant:
Inventors:

Stephen R Forrest, Chatham, NJ (US);

Martin L Kaplan, Morris Plains, NJ (US);

Paul H Schmidt, Chatham, NJ (US);

Thirumalai N Venkatesan, Bridgewater, NJ (US);

Assignee:

AT&T Bell Laboratories, Murray Hill, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B01J / ; H01L / ;
U.S. Cl.
CPC ...
2041 / ; 2041 / ; 430270 ;
Abstract

The conductivity of a wide range of carbon-containing materials is substantially increased by irradiation with particles having an atomic mass of at least 1. Both polymeric and nonpolymeric, organic and inorganic, materials can be used. The particulate irradiation, for example an ion beam, substantially breaks down the material to a form that includes amorphous carbon having unusually high conductivity. Resistivities of less than 10.sup.-3 ohm-cm are possible. When applied as a film on a substrate, the irradiated material can be used for device interconnects. Conducting lines can be produced in the film, as well as vertical contacts through the film.


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