The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 1985
Filed:
Jun. 29, 1983
Rozalie Schachter, Flushing, NY (US);
Marcello Viscogliosi, North Tarrytown, NY (US);
Lewis A Bunz, Peekskill, NY (US);
Stauffer Chemical Company, Westport, CT (US);
Abstract
Amorphous and polycrystalline films of KP.sub.15 are formed by RF diode sputtering targets of KP.sub.15 and excess phosphorus in an argon phase. Substrate temperatures up to 280.degree.-300.degree. C. provide amorphous films. Higher temperatures provide microcrystalline or polycrystalline films. These films have high resistance and may be used as the insulator in MIS devices employing III-V semiconductors. Co-sputtering with nickel increases the conductivity of the films from approximately 10.sup.-10 (ohm-cm).sup.-1 to 10.sup.-2 (ohm-cm).sup.-1 ; only reduces the optical gap by 0.2 eV; and reduces the activation energy from 0.8 eV to 0.2 eV; the nickel content varying from 5-15%. Substrates include glass, silicon, tantalum, stainless steel, gallium phosphide and gallium arsenide, and glass metallized with metals such as titanium, nickel and aluminum. Double diode electrical characteristics have been observed in devices formed on metallized glass substrates having co-sputtered thereon thin film polyphosphides and nickel with nickel and titanium top contacts.