The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1985
Filed:
Feb. 08, 1983
Applicant:
Inventor:
John C Greenwood, Harlow, GB;
Assignee:
International Telephone and Telegraph Corporation, New York, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
7386259 ; 73DI / ;
Abstract
An electro-mechanical load sensor is in the form of a mechanical resonant system with electrostatically coupled electrodes. The mechanical system is formed from a silicon wafer by a selective etching process and comprises a filament of between two terminations 12 and 13 carrying transverse plates M.sub.1 and M.sub.2. Electrostatic (capacitive) coupling to plate electrodes E.sub.1, E.sub.2, E.sub.3 in a self-exciting circuit drives the system. The resonant frequency for angular S vibrations with plates M.sub.1 and M.sub.2 in anti-phase varies with applied load L and is thus a measure of this load.