The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 1985
Filed:
Mar. 07, 1983
Applicant:
Inventor:
Wolfgang Ruhle, Erlangen, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73727 ; 73DI / ; 310338 ; 310360 ; 338-4 ;
Abstract
A pressure sensor having a semiconductor body is disclosed. The sensor comprises a substrate of a compound semiconductor and an epitaxial layer of a mixed crystal, in which different conduction band minima with different effective masses are closely adjacent energywise, particularly from the mixed crystal series gallium-aluminum-arsenic with the composition Ga.sub.1-x Al.sub.x As, in which the aluminum concentration is 0.19.ltoreq.x.ltoreq.0.43. The sensor described has a simplified design and predetermined pressure ranges can be set by varying the concentration of the crystal constituents.