The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 1985
Filed:
Mar. 28, 1983
Masaburo Iwabuchi, Yokohama, JP;
Tokyo Shibaura Denki Kabushiki Kaisha, Kawasaki, JP;
Abstract
In a lapping apparatus, washing water is ejected from washing water holes toward a carrier holding wafers after the wafers are polished. Thus, the wafers are separated from the carrier and upper and lower polishing members. Then, the carrier is forced up above the upper polishing member by a pushing ring. The wafers left on the upper member are carried onto a table by a first sweeper of an automatic collecting device. The transferred wafers are arranged in a line along a second sweeper. Then, the second sweeper pushes and moves the wafers in the direction of their arrangement toward a cassette on one side of the table. The wafers are housed in holder portions in the cassette, and are then immersed, along with the cassette, in a pure water tank.