The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 1985
Filed:
Apr. 05, 1982
Charles Irwin, Santa Ana, CA (US);
Janet Devine, Downingtown, PA (US);
Richard Kramer, Wilmington, DE (US);
Sonobond Ultrasonics, Inc., , PA (US);
Abstract
Ultrasonic transducer apparatus for cleaning applications and method for cleaning wafers of semiconductor material in which the method includes positioning the wafer proximate to but closely spaced away from a cleansing face of the ultrasonic transducer, supplying space between the cleansing face and the wafer with a cleansing fluid through an orifice in the cleansing surface and ultrasonically vibrating the cleansing face transversely to the wafer by applying an electrical signal to piezoelectric material symmetrically disposed about the orifice in the cleansing face via which the cleansing fluid is supplied, with the ultrasonic transducer including piezoelectric material symmetrically disposed with respect to the orifice in the cleansing face through which the cleansing fluid is supplied. The piezoelectric material is preferably in the form of a plurality of discreet piezoelectric elements which are provided with an input signal via a common input terminal where all of the plurality of piezoelectric elements are mechanically coupled to the cleansing face so that the piezoelectric elements, the mechanical coupling structure and a cleansing face ultrasonically vibrate as a single integral structure.