The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 1985
Filed:
Sep. 22, 1982
Applicant:
Inventor:
George O Reynolds, Waban, MA (US);
Assignee:
Honeywell Inc., Minneapolis, MN (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ; H01L / ;
U.S. Cl.
CPC ...
2504521 ;
Abstract
An optical lithographic system for exposing small linewidths on integrated circuit substrates. The system comprises a deep ultraviolet (UV) source of illumination in conjunction with a dynamic coherent condenser system and an optical projection system and a deep UV sensitive photoresist.
Reynolds, George. (1985). Optical lithographic system having a dynamic coherent optical system (U.S. Patent No. 4498009). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4498009
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile