The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 1984
Filed:
Sep. 09, 1982
Applicant:
Inventors:
William E Gates, Sommerset, NJ (US);
Wim J Pieters, Morristown, NJ (US);
Assignee:
Omicron Technology Corporation, Berkeley Heights, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
137-2 ; 137486 ; 1374875 ; 73204 ;
Abstract
An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.