The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 1984

Filed:

Nov. 27, 1981
Applicant:
Inventors:

Anthony J Armini, Bedford, MA (US);

Wallace S Kreisman, Malden, MA (US);

Assignee:

Spire Corporation, Bedford, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
378 34 ; 378141 ; 378143 ;
Abstract

A composite target cone for use in an X-ray lithography source tube. The composite target cone is multi-layered, having at least an X-ray generating layer formed of platinum, silver, palladium, rhodium, molybdenum, tungsten, silicon, aluminum or copper, and a water-interface layer. The water-interface layer includes a layer of high thermal conductivity material, covered at one side by a layer of high corrosion resistance material and at the other side by a layer of high-melting point material.


Find Patent Forward Citations

Armini, Anthony. (1984). X-ray lithography source tube (U.S. Patent No. 4477921). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4477921

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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