The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 1984
Filed:
Apr. 18, 1983
Karl A Schulke, Neuberg, DE;
Heraeus Quarzschmelze GmbH, Hanau, DE;
Abstract
A generally trough-like elongated element is formed of quartz glass, open at the top, in which the side walls (2) which, preferably, have inclined portions (4) merging with the bottom wall (1) of the trough, are formed with through-slits (3), and the bottom wall is formed with slots (5) cut therein, leaving, however, the end portions solid and uncut; the end portions are formed with positioning or alignment notches (6) extending in a direction transverse to the bottom wall which, preferably, is formed with a recess or notch for engagement with a transport apparatus. The side walls preferably have holes extending, in longitudinal alignment, through the solid end portions to permit passage of the tines of a handling fork (8) therethrough. The slits (3) and the slots (5) provide for three-point suspension of disk or plate-like semiconductor substrates for handling and introduction, for example, into a treatment or diffusion furnace or tube.