The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 1984
Filed:
Apr. 17, 1980
Applicant:
Inventors:
Katsuhiro Kuroda, Hachioji, JP;
Akira Fukuhara, Hachioji, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ; G21K / ;
U.S. Cl.
CPC ...
2503 / ; 250311 ; 2503 / ;
Abstract
The apparatus for focus-deflecting a charged particle beam includes two electron lenses for focusing the charged particle beam and a single deflector for deflecting the charged particle beam to a desired position, wherein one of the electron lenses on the object point side and the deflector are arranged so that their magnetic fields overlap each other, and the aberration generated by them offsets that generated by the other of the electron lenses.