The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 1984
Filed:
Mar. 28, 1983
Applicant:
Inventors:
Hiroshi Tanaka, Fukaya, JP;
Makoto Harigae, Fukaya, JP;
Assignee:
Tokyo Shibaura Denki Kabushiki Kaisha, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; C03C / ;
U.S. Cl.
CPC ...
156642 ; 156640 ; 156644 ; 1566591 ; 156345 ; 252 793 ;
Abstract
A method for etching an Fe-Ni alloy by reacting the Fe-Ni alloy with an etching solution which contains ferric chloride, has the step of adding Cl.sub.2 and H.sub.2 O in a reaction system of the etching solution and the Fe-Ni alloy, thereby producing ferric chloride, and thus, preventing degradation of the etching capability of the etching solution.