The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 1984
Filed:
Sep. 03, 1982
Applicant:
Inventor:
Daniel L Ellsworth, Fort Collins, CO (US);
Assignee:
NCR Corporation, Dayton, OH (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; B01J / ;
U.S. Cl.
CPC ...
148-15 ; 29571 ; 2957 / ; 29578 ; 148187 ; 357 42 ; 357 91 ;
Abstract
A CMOS process utilizes preferential oxidation of arsenic-doped regions and the reduced diffusivity of boron in arsenic-doped regions to eliminate photomask steps and to form self-aligned enhanced p.sup.+ and n.sup.+ contacts.