The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 1984
Filed:
Aug. 16, 1982
Irving Itzkan, Boston, MA (US);
Avco Everett Research Laboratory, Inc., Everett, MA (US);
Abstract
A method for laser melting of silicon for the production of boules pulled from a pool of liquid ultraclean or ultrapure silicon wherein the boules are used for producing silicon wafers suitable for use in the electronics field. A laser beam, preferably P polarized, is directed at an angle of about 88 degrees to the normal to the surface of silicon disposed in conventional melting apparatus. A suitable mirror is preferably provided to capture and reflect that portion of the laser beam reflected from the surface of the pool. Use of the present invention permits continuous operation by adding solid silicon and melting it at the point of impingement of the laser beam with up to about 96% absorption of laser energy at this point, thereby permitting the provision of heat in a very controlled manner in a continuous ultraclean silicon crystal growth process.