The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 1984
Filed:
Jun. 11, 1982
Applicant:
Inventors:
Seiji Hata, Fujisawa, JP;
Takao Terabayashi, Yokohama, JP;
Noriyoshi Arakawa, Fujisawa, JP;
Makoto Watanabe, Matsudo, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
2191 / ; 2191 / ; 2191 / ; 2191 / ;
Abstract
An electron beam drilling apparatus for drilling a number of holes in a substrate by an electron beam is disclosed. The holes are drilled at a high speed by scanning the electron beam along a direction perpendicular to the direction of movement of the workpiece while the workpiece is moved at a high speed. A drilling position error due to the high speed movement of the workpiece is corrected by controlling an electron beam deflection unit and an electron beam generator.