The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 1984
Filed:
May. 28, 1982
Applicant:
Inventor:
Mark J Dreiling, Bartlesville, OK (US);
Assignee:
Phillips Petroleum Company, Bartlesville, OK (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427 39 ; 427 541 ; 427 74 ; 427140 ; 4272551 ;
Abstract
A method for healing physical defects in semiconductive films is described. A transparent substrate and semiconductive film are passed to a vacuum chamber in which the film layer is contacted with an activating vapor such as mercury and a depositing vapor such as silane while light is passed through the transparent substrate from the side opposite the film and into the vacuum chamber through any defects in the film. The light activates the mercury vapor and deposits silicon hydride in the defect areas, thus providing a physically healed semiconductive film.