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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 4465716 B1

PDFFull Text
Date of Patent:
Aug. 14, 1984

Filed:

Jun. 02, 1982

Selective deposition of composite materials

Applicant:
Inventors:

Samuel C Baber, Richardson, TX (US);

Vernon R Porter, Plano, TX (US);

Assignee:

Texas Instruments Incorporated, Dallas, TX (US);

Attorneys:

Groover; Robert

Comfort; James T.

Sharp; Melvin

Primary Examiner:

John D Smith

Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
427 531 ; 2041 / ; 427 89 ; 427 93 ; 427 96 ; 427259 ; 427348 ; 427349 ;
Abstract

A method for selectively depositing a composite material over high-thermal-conductivity areas (such as silicon) and not over low-thermal-conductivity areas (such as oxide), which does not require any additional patterning step. A composite material, such as TiW is deposited overall by sputtering. A short pulse of light is then applied, and the composite material over the oxide separates and flakes off, while the composite material over the high-thermal-conductivity area remains in place.

Published as:
US4465716A;

Find Patent Forward Citations

Baber, Samuel. (1984). Selective deposition of composite materials (U.S. Patent No. 4465716). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4465716

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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