The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 1984
Filed:
Oct. 14, 1982
Michael T Gale, Wettswil, CH;
Karl H Knop, Zurich, CH;
RCA Corporation, New York, NY (US);
Abstract
A commercial X-Y positioning table is modified, to limit its dynamic X-positioning error to less than .+-.0.05 micrometer at rates of speed in the Y direction of up to 20 millimeters per second, by mounting an X direction translation stage having fast inertial response characteristics on the Y direction stage of the positioning table and employing an interferometer controlled X position feedback circuit to provide X error compensating movement of the translation stage with respect to dynamic X position errors of the Y direction stage. This permits the generation of sub-micrometer geometry exposure patterns in photoresist for the fabrication of fine relief structures.