The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 1984
Filed:
Oct. 02, 1981
Robert J Nielsen, Upper Black Eddy, PA (US);
AT&T Bell Laboratories, Murray Hill, NJ (US);
Abstract
A hydraulically driven X-Y stage for use primarily in optical pattern generators, especially those requiring a vacuum. A pair of hydraulic cylinders (10 and 20) provide the motion along the step and slew axes. The cylinders can be constructed so that either the rod (11 and 21) or the outer carriage (12 and 22) moves due to the oil pressure differential. Hydraulic bearings (36) between the rod and carriage prevent sliding friction while providing stiffness to linear motion in undesired directions. The rods have areas designed, in combination with the bearings, to prevent rotational motion. Hollow tubes and chambers (14, 15, 41-44, and 24) are provided for feeding oil to the cylinders, and flexible metal bellows (19, 34, and 35) surround the cylinders and keep the oil contained.