The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 1984
Filed:
Mar. 30, 1983
Richard M Josephs, Willow Grove, PA (US);
Ronald A Flowers, North Wales, PA (US);
Peter L Young, North Wales, PA (US);
Sperry Corporation, New York, NY (US);
Abstract
An apparatus comprising a rotating substrate holder is provided. The rotating substrate holder is hollow and adapted to receive liquid gas such as nitrogen to cool the substrate to cryogenic temperatures. The novel substrate holder is supported inside of a vacuum chamber by a thin wall tube which is sealed with a liquid rotating seal at the point where it passes completely through the top wall of the vacuum chamber. The novel thin wall tube support provides access to the hollow substrate holder from outside the vacuum chamber and provides temperature isolation of the liquid in the substrate holder so that the liquid rotating seals are maintained at operable elevated temperatures.