The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1984
Filed:
Jun. 09, 1982
Applicant:
Inventors:
Assignee:
Japan Oxygen Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K / ;
U.S. Cl.
CPC ...
251133 ; 251161 ; 251175 ;
Abstract
A sluice valve arrangement is adapted to make an air-tight partition or communication between a vacuum treatment chamber and the atmosphere or a pre-chamber. This arrangement includes a valve seat member comprising a cylindrical or spherical member having therein an opening, a pair of guide rails attached to the inner circumference of the seat member, a valve member movably supported on the guide rails, and means for air-tight engagement of the valve member and the valve seat portion of the seat member. The valve member has a curvature equal to that of the cylindrical or spherical member, and the engagement means comprises a plurality of bellows expandable by a compressed gas or air.