The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 1984
Filed:
Mar. 14, 1983
Gerard Samuels, Paoli, PA (US);
RCA Corporation, New York, NY (US);
Abstract
A liquid spray apparatus provides predetermined, uniform quantity of liquid (such as photoresist developer) per unit area of surface by a parabolic cam mechanism, arranged to repeatedly reciprocate a nozzle at a predetermined varying linear velocity a plurality of times over a spinning surface, such as a semiconductor device wafer. The mechanism moves the nozzle at a parabolic varying velocity whereby the liquid is deposited at a uniform quantity per unit area. The cam is continuously rotated and engaged with a spring-biased cam follower during the spraying period. The cam follower is engaged and disengaged with the cam by a programable timer defining the spraying period.