The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 15, 1984
Filed:
Sep. 30, 1982
Applicant:
Inventor:
Horst Pachonik, Taufkirchen, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041 / ;
Abstract
Device for cathode sputtering of metal, comprising a holder, means for cooling the holder, a heat conducting paste layer disposed on the holder, and a target bolted to the holder with the heat conducting paste layer disposed therebetween as a heat transfer medium, the target being formed of the metal to be sputtered. The heat conducting layer may also be metal powder or foil.
Pachonik, Horst. (1984). Device for the cathode sputtering of a metal (U.S. Patent No. 4448652). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4448652
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile