The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 1984
Filed:
Jun. 29, 1983
Applicant:
Inventors:
Hiroshi Nishiyama, Mukoh, JP;
Takeshi Nakamura, Uji, JP;
Assignee:
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310364 ; 310321 ;
Abstract
An Al electrode structure for a zinc oxide thin film in which an intermediate layer of V.sub.2 O.sub.3, Ta, V, Cu, Ni or Ti is provided between the surface of the zinc oxide thin film and the Al electrode. A tuning fork vibrator equipped with such an electrode structure has high reliability in that changes in resonance frequency and series resonance resistance (Ro) with time are small.