The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 1984
Filed:
Oct. 27, 1982
Robert G Hunsperger, Malibu, CA (US);
Gordon A Shifrin, Malibu, CA (US);
Hughes Aircraft Company, El Segundo, CA (US);
Abstract
Disclosed is an improved optical waveguide and modulator and an ion implantation process for fabricating same. The process includes the step of implanting high energy protons in a suitable semiconductive substrate material, such as gallium arsenide, to form a semi-insulating wave guiding layer therein for efficiently sustaining light propagation. The relatively large difference between the refractive indices of the high resistivity proton implanted layer and of the underlying low resistivity substrate result in highly efficient coupling and modulation of light passing through the proton implanted layer. The letter is partly the result of the relatively high resistivity attainable by proton implantation and partly the result of the sharp profile of ion dosage versus proton implantation distance into the substrate.