The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 1984

Filed:

Oct. 28, 1982
Applicant:
Inventors:

William E Flannery, Norristown, PA (US);

Richard M Josephs, Willow Grove, PA (US);

Barry F Stein, Dresher, PA (US);

Tsing-Chow Wang, Norristown, PA (US);

Peter L Young, North Wales, PA (US);

Assignee:

Sperry Corporation, New York, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
29589 ; 427 63 ; 427 99 ; 427250 ; 427255 ; 4272551 ; 4272553 ; 4272557 ; 156643 ;
Abstract

During the manufacture of Josephson superconducting devices, it is necessary to provide on a substrate a base electrode, a counter electrode and a small tunnel barrier area therebetween. A novel method of making all three of these active elements in the same vacuum chamber without having to remove the substrate from the vacuum chamber is provided so that the tunnel barrier area is accurately made to a predetermined size and without the danger of contamination. The novel structure is made as a substantially planarized laminate in the vacuum chamber and the tunnel barrier area is defined in a supplemental step.


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