The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 1984
Filed:
Feb. 11, 1982
Shigetomo Yamazaki, Hachioji, JP;
Kabushiki Kaisha Akashi Seisakusho, Tokyo, JP;
Abstract
The specification describes a scanning electron microscope or similar equipment having a magnetic pole piece detachably provided in an opening of a lower pole of its electromagnetic objective lens so as to decrease the magnetic flux leaked through the opening when the specimen is placed below the lower pole. The above scanning electron microscope or similar equipment may also include a change-over system for varying the crossing point between a scanning charged particle beam and an optical axis depending whether the specimen is placed in the vicinity of the lens center of the objective lens or below the lower pole. Accordingly, the specimen can be placed either below the lower pole of the objective lens or in the vicinity of the lens center as the operator desires, thereby making the scanning electron microscope or similar equipment applicable for varied purposes. Owing to the provision of the change-over system, a specimen image of good quality can always be obtained even if the specimen is placed at different locations.