The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 1984
Filed:
May. 03, 1982
Applicant:
Inventors:
Konstantin Hoerschelmann, Munich, DE;
Helmold Kausche, Munich, DE;
Werner Sp/a/ th, Holzkirchen, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01J / ;
U.S. Cl.
CPC ...
204164 ; 148189 ;
Abstract
Method for doping semiconductor material, including a container into which doping material is led and aimed at the semiconductor material by means of an electrical field, which includes maintaining the doping material in a plasma in the container, and leading doping material ions into the semiconductor material by means of the electrical field, and an apparatus for carrying out the method.