The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1984
Filed:
Jul. 30, 1981
Applicant:
Inventors:
Kazumitsu Nakamura, Katsuta, JP;
Masaru Miyazaki, Ome, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K / ; B23K / ;
U.S. Cl.
CPC ...
250397 ; 2504911 ; 2191 / ;
Abstract
With the invention an electron beam scans reference marks formed on a sample so as to determine the positions of the reference marks. The sample is scanned by the electron beam with respect to the positions of the reference marks thereby to form a desired pattern on the sample. The accelerating voltage for the electron beam is changed to a lower value upon scanning the sample for generation of a pattern than upon scanning the reference marks.