The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 1984
Filed:
Apr. 23, 1981
Akitsuna Yuhara, Yokohama, JP;
Shinya Iida, Tama, JP;
Hideo Abe, Yokosuka, JP;
Kiyoharu Kishimoto, Yokohama, JP;
Katashi Hazama, Zushi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A surface acoustic wave device, a method for manufacturing the same and a manufacturing equipment therefor are disclosed. In the surface acoustic wave device having functional elements such as input and output interdigital electrodes of Al, Al-Si alloy or Al-Cu-Si alloy thin film strips and a grating type reflector, arranged on a piezoelectric substrate and any other bus conductors arranged on the same substrate, at least a portion of the functional elements and the bus conductors having a high frequency metal strip having a line width of no more than 2 .mu.m, at least the metal strip having the width of no more than 2 .mu.m has a film thickness of no less than 0.25 .mu.m at least a portion thereof but no more than an upper limit of an effective film thickness determined by a required characteristic of the surface acoustic wave device, whereby a transfer characteristic of the surface acoustic wave device is compensated and controlled, for example, a reflection efficiency of a grating type reflector is improved or a loss due to a D.C. resistance of the input and output electrodes is reduced.