The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 24, 1984
Filed:
Dec. 31, 1981
Bulusu V Dutt, Parsippany, NJ (US);
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Abstract
A method of liquid phase epitaxy is disclosed for growing a plurality of different layers on each of a plurality of semiconductor wafers during a single heating cycle. Each of a series of melts, each corresponding to a layer to be grown, is divided, in succession, into aliquant portions and a remainder portion. Each aliquant portion is contacted by one or more wafers, and epitaxial growth occurs as the temperature is lowered. Provision of a remainder portion enables a two-phase melt, and a wafer contacts only one distinct melt at a time. After a growth step, the next successive melt likewise is separated into aliquant portions and a remainder portion, the wafers are removed from the preceding melt chambers and placed in contact with the newly formed aliquant portions, and growth of another layer ensues from another drop in temperature. The process is repeated for each melt provided. Apparatus for carrying out the method also is described.