The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 1984
Filed:
Mar. 30, 1982
Applicant:
Inventor:
Merrill G Robinson, Ann Arbor, MI (US);
Assignee:
Shatterproof Glass Corporation, Detroit, MI (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
204298 ; 2041 / ;
Abstract
A gas distribution system for use with a sputtering cathode mounted in a vacuum chamber and provided with a planar target formed of the material to be sputtered upon planar substrates passing therebeneath, in which two divergent streams of gas are introduced into the vacuum chamber, one of the gases being an inert gas directed into the upper portion of the chamber adjacent the target and the other gas being a reactive gas directed into the lower portion of the chamber adjacent the substrate.