The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 1983
Filed:
Jun. 02, 1982
Applicant:
Inventors:
John B MacChesney, Stirling, NJ (US);
Paul B O'Connor, Plainfield, NJ (US);
Miles V Sullivan, Summit, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; B41N / ;
U.S. Cl.
CPC ...
156655 ; 156667 ; 427143 ; 427166 ; 4272553 ; 4274192 ;
Abstract
Iron oxide films for 'see-through' photomasks are deposited upon heated substrates by chemical vapor deposition from iron pentacarbonyl in the presence of oxygen. The solubility of the iron oxide film is found to be higher, the lower the temperature of the substrate during deposition. At temperatures below 160 degrees C., films are obtained which can be patterned at reasonable rates by photolithographic procedures using conventional mild etchants.