The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 1983
Filed:
Jan. 28, 1982
Applicant:
Inventor:
Samson Kirshman, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F27D / ;
U.S. Cl.
CPC ...
432253 ; 373 18 ; 432258 ;
Abstract
Wafer tray construction for use in a gas plasma reactor. A plurality of the trays are arranged in an array, with an overlap at the adjacent edges of the trays to prevent line-of-sight communication between the trays and ion bombardment of the support on which the trays are mounted. In one disclosed embodiment, the edges of the trays are configured to form the overlap, and in a second embodiment bars inserted between the trays cooperate with the edge portions to form the overlap.