The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 15, 1983
Filed:
Jun. 22, 1981
Applicant:
Inventors:
Bruce F Griffing, Schenectady, NY (US);
Peter D Johnson, Schenectady, NY (US);
Roger N Johnson, Hagaman, NY (US);
Assignee:
General Electric Company, Schenectady, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
F21S / ;
U.S. Cl.
CPC ...
362225 ; 313638 ; 362230 ; 362263 ; 362290 ; 362342 ;
Abstract
Apparatus is disclosed for uniform exposure of a plurality of objects such as semiconductor wafers to radiation utilizing sources of radiation of linear configuration. The apparatus includes a baffle assembly of particular construction and constitution situated between the linear sources and the region to be irradiated.