The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1983
Filed:
Jun. 18, 1982
Applicant:
Inventors:
Osamu Michikami, Tohkai, JP;
Yujiro Katoh, Mito, JP;
Keiichi Tanabe, Mito, JP;
Hisataka Takenaka, Mito, JP;
Shizuka Yoshii, Mito, JP;
Assignee:
Nippon Telegraph & Telephone Public Corporation, Musashino, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; H01L / ;
U.S. Cl.
CPC ...
2041 / ; 156643 ; 357-5 ; 427 62 ; 427 63 ;
Abstract
There is disclosed a method of fabrication of a Josephson tunnel junction device. A surface of a base electrode of Nb or Nb compound is subjected to sputter cleaning and then to plasma oxidation in an atmosphere of a diluent gas and oxygen to form thereon an oxide layer serving as a tunnel barrier. A counter electrode is then formed on the oxide layer to provide the Josephson tunnel junction.
Michikami, Osamu. (1983). Method of fabrication of josephson tunnel junction (U.S. Patent No. 4412902). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4412902
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile