The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 1983
Filed:
Jan. 05, 1982
Applicant:
Inventors:
Suehiro Kato, Nagaokakyo, JP;
Kenji Ando, Kyoto, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
2041 / ;
Abstract
A method of making zinc oxide film comprises the steps of forming a zinc oxide layer on a substrate by carrying out radio-frequency sputtering with a target of zinc oxide, forming a zinc oxide layer on said zinc oxide layer by carrying out reactive, direct-current or radio-frequency sputtering with a target of zinc metal.
Kato, Suehiro. (1983). Method of preparing zinc oxide film (U.S. Patent No. 4410408). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4410408
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile