Apparatus for manipulating a stretched resilient diaphragm

Abstract

In a manufacturing operation, a stretched diaphragm is used to support a quantity of small parts which are individually secured to the diaphragm in predetermined spaced relation. An individual part is elevated relative to the remainder of the array, for purpose of inspection or test, by displacing and even further stretching the associated portion of the diaphragm; then it is permitted to return to its original place in the array. When the parts are to be incorporated into manufactured assemblies each selected part is again elevated by displacing and stretching the associated portion of the diaphragm. The method is applied to the manufacture of microminiature electric circuits in which a flat wafer is first formed, and the wafer is then cut into a number of chips which must be individually tested and then they are incorporated into circuit assemblies. Apparatus for carrying out the method includes a support member having a flat upper surface, an annular opening in the flat surface forming a suction ring, means for applying vacuum to the suction ring, a central hole in the flat surface within the suction ring, and a pusher member that can be selectively raised from within the central hole. The apparatus also includes means for creating a vacuum at the periphery of the central hole, and internal controls for controlling the sequence of operation of the two vacuum means and the pusher member.