The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 1983
Filed:
Jul. 15, 1981
Applicant:
Inventor:
Bernd Kolbesen, Munich, DE;
Assignee:
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C25F / ; B23P / ;
U.S. Cl.
CPC ...
2041293 ; 20412946 ; 20412965 ; 20412975 ; 2042 / ;
Abstract
Method of separating a semiconductor crystal, in particular a rod-like semiconductor crystal, into wafers by first providing it with a masking layer of non-conducting material interrupted by stripes. The semiconductor crystal is biased as an anode and is immersed in an electrolyte which is provided with an electrode serving as the cathode. The oxide layers produced in the regions of the semiconductor crystal which are not masked, are removed mechanically.