The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 1983
Filed:
May. 04, 1981
Applicant:
Inventors:
Klaus-Jurgen Heimbach, Hattersheim, DE;
Walter Zultzke, Hanau, DE;
Assignee:
Leybold-Heraeus GmbH, Cologne, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118692 ; 118663 ; 118690 ; 118715 ; 118726 ;
Abstract
An apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein the addition of oxygen to a predetermined value, the pressure 'p' in the vacuum chamber is measured, and the evaporation rate 'r' for any pressure changes is regulated such that the ratio of pressure to evaporation rate p:r is maintained substantially constant.