The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1983
Filed:
Oct. 13, 1981
James L Swindal, East Hampton, CT (US);
Daniel H Grantham, Glastonbury, CT (US);
United Technologies Corporation, Hartford, CT (US);
Abstract
A silicon capacitive pressure transducer 34 comprising two wafers of silicon 14, 32 separated by borosilicate glass 18, 21, one of the wafers 14 having a borosilicate glass pedestal 26 thereon which is metallized 30 to provide one plate of a capacitor, the other plate of which is the surface of one of the silicon wafers 32. The distance between the upper surface of the glass pedestal and the lower surface of the silicon wafer is defined by a portion 18 of the borosilicate glass, the portion 21 of borosilicate glass being the same height as that of the glass pedestal 26. An embodiment of a transducer 34b employs a silicon pedestal 26b, wherein the glass portion 21b only provides separation of the silicon wafers 14b, 32b with lower parasitic capacitance.