The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 1983
Filed:
Feb. 23, 1981
Applicant:
Inventors:
Ming L Tarng, Mercerville, NJ (US);
Walter A Hicinbothem, Jr, Levittown, PA (US);
Assignee:
RCA Corporation, New York, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
427 89 ; 2041 / ; 427 91 ; 427124 ; 427253 ; 4272551 ;
Abstract
The surface of a dielectric is exposed to gaseous WF.sub.6 and H.sub.2 at a temperature between approximately 500.degree. C. and 650.degree. C. This initiates the formation of tungsten islands on the dielectric surface without damaging the surface. An appropriate metallization layer is then deposited from the vapor phase onto the tungsten island covered dielectric surface.