The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 1983
Filed:
Mar. 29, 1979
Applicant:
Inventors:
John K Daly, Scottsdale, AZ (US);
Malvin D Terry, Phoenix, AZ (US);
Assignee:
Advanced Semiconductor Materials America, Phoenix, AZ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ; G01N / ; G01N / ; G01N / ;
U.S. Cl.
CPC ...
356446 ; 356445 ; 356430 ; 356426 ; 356244 ;
Abstract
A surface inspection system utilizes a laser light source, and a vacuum chuck to support the material whose surface is to be inspected. The vacuum chuck is rotatable. The laser beam may be translated across the work surface while the chuck is rotated, all the while maintaining mutual perpendicularity of the vacuum chuck work surface and the laser beam. An airtrack transports the material whose surface is to be inspected. Sensors are utilized to detect the position of such material along the track and to guide the system in its operation.