The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 1983
Filed:
Nov. 06, 1981
Kiyoshi Ishibashi, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Toyko, JP;
Abstract
A pressure sensor comprises: a pressure sensor chip including a diaphragm, a stationary support supporting said diaphragm, and a bed supporting said stationary support, said diaphragm, said stationary support and said bed being made of a semiconductor material and defining a space which is evacuated; a holding box having at least its bottom made of metal and having a hole for internal wiring, said holding box accommodating and holding said pressure sensor chip such that the opposite side to the diaphragm of said pressure sensor chip is in contact with the inner side of said bottom and that said pressure sensor chip is restricted from movement; and a package placing and adhering said holding box in position.