The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 1983
Filed:
Oct. 06, 1981
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A method and apparatus for manufacturing an ultrafine particle film which has great practical utility when deposited on an appropriate substrate. The particle film is produced from various ultrafine particles of, for example, metals, oxides, nitrides and carbides, and is produced uniformly, effectively and efficiently with a high degree of reproducibility. According to a first method, an atmosphere at a gas of a reduced pressure is formed in a vessel, and a forced flow of the gas is formed unidirectionally from an evaporation source to the substrate, so that the evaporated matters from the evaporation source are forced to move together with the forced flow of the gas, so that ultrafine particles which are formed through interaction between the evaporated matters and the gas deposited on the substrate thereby forming the ultrafine particle film. According to a second method, the evaporation source is disposed within a vessel of having a reduced gas pressure as well as a cylinder surrounded by a high-frequency coil. As the coil is energized, the gas in the cylinder is excited. The evaporated matters are forced to flow through the excited gas atmosphere so that ultrafine particles formed by an interaction between the evaporated matters and the excited gas are deposited on the substrate thereby forming the ultrafine particle layer. A third method is a combination of the first and second methods.