The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 1983
Filed:
Apr. 01, 1981
Applicant:
Inventor:
Albert V Crewe, Palos Park, IL (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K / ;
U.S. Cl.
CPC ...
2503 / ; 3133611 ;
Abstract
A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.