The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 1983
Filed:
Sep. 08, 1981
Toyo Soda Manufacturing Co., Ltd., Shin Nanyo, JP;
Abstract
A method of manufacturing highly purified silicon nitride including the steps of preparing a nitrogen-containing silane selected from the group consisting of tetra-amide-monosilane and silicon imide, and heat-treating the prepared nitrogen-containing silane in the presence of ammonia in an inner atmosphere at a temperature above 400.degree. C. for a period of at least two hours to obtain silicon nitride, and cooling and collecting the silicon nitride thus formed. The step of preparing the nitrogen-containing silane comprises continuously reacting gaseous silicon tetra-chloride with gaseous ammonia in an inner atmosphere at a temperature of from -30.degree. to 70.degree. C. to produce the nitrogen-containing silane as a product and collecting the product. The resultant silicon nitride so produced has a chlorine content of less than 0.05 weight percent and a nitrogen content of over 38 weight percent.