The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 1983
Filed:
Jun. 08, 1981
Applicant:
Inventors:
Theodore F Zehnpfennig, Wayland, MA (US);
Giuseppe Aurilio, Arlington, MA (US);
Assignee:
Visidyne, Inc., Burlington, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A61K / ; H01L / ;
U.S. Cl.
CPC ...
2957 / ; 2504922 ;
Abstract
An alignment system for realigning one portion of an integrated circuit wafer relative to another portion of the same wafer including: a support member for mounting a wafer to be realigned and having a plurality of laterally disposed zones; and means for selectively, laterally deforming the zones of the support member for realigning corresponding portions of a wafer mounted on the support member.