The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1983
Filed:
Oct. 26, 1981
Applicant:
Inventor:
Bulusu V Dutt, Parsippany, NJ (US);
Assignee:
Bell Telephone Laboratories, Incorporated, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
2956 / ; 2957 / ; 148171 ; 148172 ; 1566 / ;
Abstract
The occurrence of pyramidal protrusions on the surface of GaAs and GaAlAs p-n junction wafers produced by a multislice liquid phase epitaxy process is avoided by slow cooling to a specified quenching temperature or below. The pyramidal protrusions are constituted of the silicon which is the amphoteric dopant used in these semiconductors. Pyramids are not formed if the epitaxial reactor is cooled at a rate of 1.degree. Celsius to 3.degree. Celsius per minute to a temperature less than about 140.degree. Celsius before the wafers are moved to the cool portion of the reactor and then further cooled to room temperature.